Pattern formation on the compound semiconductor surface after selective electrochemical etching
Title | Pattern formation on the compound semiconductor surface after selective electrochemical etching |
Publication Type | Conference Paper |
Year of Publication | 1998 |
Publication Language | eng |
Pagination | 39 - 42 |
Authors | Nemcsics, Á., D. L, K. B, and M. I |
Conference Name | ASDAM 98, 2nd International Conference on Advanced Semiconductor Devices and Microsystems |
Date Published | 1998 |
Publisher | Smolenice Castle |