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Real Time RHEED Evaluation with the Help of Image Processing

TitleReal Time RHEED Evaluation with the Help of Image Processing
Publication TypeConference Paper
Year of Publication2010
Publication Languageenglish
PaginationIEEE Catalog Number: CPF1084C-CDR
AuthorsNemcsics, Á., T. Sándor, G. Tényi, and M. Csutorás
Conference Name SISY 2010, 2010 IEEE 8th Int. Symposium on Intelligent Systems and Informatics
Date Published09/2010
PublisherIEEE
Conference LocationSubotica
ISBN Number978-1-4244-7395-3
KeywordsRHEED
Abstract

In this paper, the reflection high-energy electron
diffraction (RHEED) pattern during the nano structure
formation with the help of image processing is investigated.
Nowadays, the growth of self-organised nano structures has
been intensively investigated. It is very important to
understand their growth process and the knowledge about
their shape is particularly significant. The growth of these
nano structures can be tracked in-situ manner with the help
of RHEED. In-situ information about the stage of the process
and the shape of the structure has been provided by RHEED.
The temporal relation between the formation of the nano
structure and the RHEED pattern is rather complicate. The
image processing of the RHEED pattern help us to recognize
and to interpret the metamorposis of the pattern during the
growth process.