Design of a planar high precision motion stage
Title | Design of a planar high precision motion stage |
Publication Type | Conference Paper |
Year of Publication | 2009 |
Publication Language | english |
Pagination | 371-379 |
Authors | Hermann, G., K. Kozlowsky, and J. Tar |
Conference Name | 7th International Workshop on Robot Motion and Control |
Conference Location | Czerniejewo, Poland |