The design of a low cost submicron measuring probe
Title | The design of a low cost submicron measuring probe |
Publication Type | Conference Paper |
Year of Publication | 2009 |
Publication Language | english |
Pagination | 34 |
Authors | Hermann, G. |
Editor | Marcinkevicius, A. H. |
Conference Name | 5th International Conference on Mechatronic Systems and Materials MSM 2009 |
Conference Location | Vilnius, Latvia |