Fabrication of a-SiGe Structure by RF Sputtering for Solar Cell Purposes
| Title | Fabrication of a-SiGe Structure by RF Sputtering for Solar Cell Purposes |
| Publication Type | Journal Article |
| Year of Publication | 2003 |
| Authors | Serényi, M., J. Betko, Á. Nemcsics, N. Q. Khanh, and M. Morvic |
| Journal | PHYSICA STATUS SOLIDI C-CONFERENCES AND CRITICAL REVIEWS |
| Volume | 00 |
| Issue | 3 |
| Pagination | 857 - 861 |
| Date Published | 2003 |
| Publication Language | eng |
| URL | www.mtakpa.hu/kpa/download/1276172.pdf |