Publications
Found 4 results
Filters: Author is M Serényi [Clear All Filters]
"Spectroellipsometric characterization of sputtered amorphous silicon germanium thin films",
E-MRS 2005 Spring Meeting, pp. & - , 2006.
"Studies on the sputtered hydrogenated amorphous SiGe thin films",
Proceedings of 10th Joint Vacuum Conference, pp. 80 - 81, 2004.
"Fabrication of a-SiGe Structure by RF Sputtering for Solar Cell Purposes",
PHYSICA STATUS SOLIDI C-CONFERENCES AND CRITICAL REVIEWS, vol. 00, issue 3, pp. 857 - 861, 2003.
"Fabrication of a-SiGe Structure by Magnetron Sputtering for Solar Cell Purposes",
Book of Abstracts EXMATEC 2002, pp. - , 2002.