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Publications

Found 4 results

Filters: Author is M Serényi  [Clear All Filters]
2006
Lohner, T., M. Serényi, Z. Zolnai, P. Petrik, Á. Nemcsics, and N. Q. Khanh, "Spectroellipsometric characterization of sputtered amorphous silicon germanium thin films", E-MRS 2005 Spring Meeting, pp. & - , 2006.
2004
Serényi, M., T. Lohner, N. Q. Khanh, Á. Nemcsics, and P. Turmezei, "Studies on the sputtered hydrogenated amorphous SiGe thin films", Proceedings of 10th Joint Vacuum Conference, pp. 80 - 81, 2004.
2003
Serényi, M., J. Betko, Á. Nemcsics, N. Q. Khanh, and M. Morvic, "Fabrication of a-SiGe Structure by RF Sputtering for Solar Cell Purposes", PHYSICA STATUS SOLIDI C-CONFERENCES AND CRITICAL REVIEWS, vol. 00, issue 3, pp. 857 - 861, 2003.
2002
Serényi, M., J. Betko, Á. Nemcsics, N. Q. Khánh, and M. Morvic, "Fabrication of a-SiGe Structure by Magnetron Sputtering for Solar Cell Purposes", Book of Abstracts EXMATEC 2002, pp. - , 2002.