Layer thickness limitation in GaAs cloride VPE system
Title | Layer thickness limitation in GaAs cloride VPE system |
Publication Type | Journal Article |
Year of Publication | 1991 |
Authors | Somogyi, K., S. Varga, and Á. Nemcsics |
Journal | CRYSTAL PROPERTIES AND PREPARATION |
Volume | 36-38 |
Pagination | 525 - 529 |
Date Published | 1991 |
Publication Language | eng |