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Fabrication of a-SiGe Structure by Magnetron Sputtering for Solar Cell Purposes

TitleFabrication of a-SiGe Structure by Magnetron Sputtering for Solar Cell Purposes
Publication TypeConference Paper
Year of Publication2002
Publication Languageeng
Pagination -
AuthorsSerényi, M., J. Betko, Á. Nemcsics, N. Q. Khánh, and M. Morvic
Conference NameBook of Abstracts EXMATEC 2002
Date Published2002

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