Fabrication of a-SiGe Structure by Magnetron Sputtering for Solar Cell Purposes
Title | Fabrication of a-SiGe Structure by Magnetron Sputtering for Solar Cell Purposes |
Publication Type | Conference Paper |
Year of Publication | 2002 |
Publication Language | eng |
Pagination | - |
Authors | Serényi, M., J. Betko, Á. Nemcsics, N. Q. Khánh, and M. Morvic |
Conference Name | Book of Abstracts EXMATEC 2002 |
Date Published | 2002 |