Chemical Beveling of Si/SiGe Structures for Structure and Material Analysis by Raman Spectroscopy
| Title | Chemical Beveling of Si/SiGe Structures for Structure and Material Analysis by Raman Spectroscopy |
| Publication Type | Conference Paper |
| Year of Publication | 2002 |
| Publication Language | eng |
| Pagination | 195 - 198 |
| Authors | Srnanek, R., R. Kinder, D. Donoval, L. Peternai, I. Novotny, J. Geurts, D. S. McPhail, R. Chater, and Á. Nemcsics |
| Conference Name | Proc. of 4th Int. Conf. on Advanced Semiconductor Devices and Microsystems |
| Date Published | 2002 |