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Si3N4 based non-volatile memory structures with embedded Si nanocrystals

TitleSi3N4 based non-volatile memory structures with embedded Si nanocrystals
Publication TypeConference Proceedings
Year of Publication2008
AuthorsBasa, P., Z. J. Horváth, T. Jászi, A. E. Pap, G. Molnár, A. Kovalev, D. Wainstein, and P. Turmezei
Conference Name7th Int. Conf. Advanced Semiconductor Devices and Microsystems, ASDAM 2008
Series TitleAdvanced Semiconductor Devices and Microsystems
Volume7
Pagination63-66
Conference LocationSmolenice, Slovakia
Publication LanguageEnglish

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