Si3N4 based non-volatile memory structures with embedded Si nanocrystals
Title | Si3N4 based non-volatile memory structures with embedded Si nanocrystals |
Publication Type | Conference Proceedings |
Year of Publication | 2008 |
Authors | Basa, P., Z. J. Horváth, T. Jászi, A. E. Pap, G. Molnár, A. Kovalev, D. Wainstein, and P. Turmezei |
Conference Name | 7th Int. Conf. Advanced Semiconductor Devices and Microsystems, ASDAM 2008 |
Series Title | Advanced Semiconductor Devices and Microsystems |
Volume | 7 |
Pagination | 63-66 |
Conference Location | Smolenice, Slovakia |
Publication Language | English |