Si3N4 based non-volatile memory structures with embedded Si and Ge nanocrystals
| Title | Si3N4 based non-volatile memory structures with embedded Si and Ge nanocrystals |
| Publication Type | Conference Proceedings |
| Year of Publication | 2009 |
| Authors | Horváth, Z. J., P. Basa, T. Jászi, A. E. Pap, G. Molnár, A. Kovalev, D. Wainstein, and P. Turmezei |
| Conference Name | 32nd Int. Spring Seminar Electron. Technol. |
| Series Title | Int. Spring Seminar Electron. Technol. |
| Volume | 32 |
| Conference Location | Brno, Czech Republic |