Warning: Table './science/sessions' is marked as crashed and should be repaired query: SELECT u.*, s.* FROM users u INNER JOIN sessions s ON u.uid = s.uid WHERE s.sid = 'l2hh0s2ak3gae3i9qi975sptv0' in /var/www/html/science/science.uni-obuda.hu/includes/database.mysql.inc on line 135 Warning: Table './science/watchdog' is marked as crashed and should be repaired query: INSERT INTO watchdog (uid, type, message, variables, severity, link, location, referer, hostname, timestamp) VALUES (0, 'php', '%message in %file on line %line.', 'a:4:{s:6:\"%error\";s:12:\"user warning\";s:8:\"%message\";s:173:\"Table './science/sessions' is marked as crashed and should be repaired\nquery: SELECT COUNT(sid) AS count FROM sessions WHERE timestamp >= 1783583796 AND uid = 0\";s:5:\"%file\";s:63:\"/var/www/html/science/science.uni-obuda.hu/includes/session.inc\";s:5:\"%line\";i:120;}', 3, '', 'http://science.uni-obuda.hu/node/4977', '', '216.73.216.36', 1783584696) in /var/www/html/science/science.uni-obuda.hu/includes/database.mysql.inc on line 135 Warning: Table './science/watchdog' is marked as crashed and should be repaired query: INSERT INTO watchdog (uid, type, message, variables, severity, link, location, referer, hostname, timestamp) VALUES (0, 'php', '%message in %file on line %line.', 'a:4:{s:6:\"%error\";s:12:\"user warning\";s:8:\"%message\";s:184:\"Table './science/sessions' is marked as crashed and should be repaired\nquery: SELECT COUNT(DISTINCT s.uid) FROM sessions s WHERE s.timestamp >= 1783583796 AND s.uid > 0\";s:5:\"%file\";s:67:\"/var/www/html/science/science.uni-obuda.hu/modules/user/user.module\";s:5:\"%line\";i:776;}', 3, '', 'http://science.uni-obuda.hu/node/4977', '', '216.73.216.36', 1783584696) in /var/www/html/science/science.uni-obuda.hu/includes/database.mysql.inc on line 135 Warning: Table './science/watchdog' is marked as crashed and should be repaired query: INSERT INTO watchdog (uid, type, message, variables, severity, link, location, referer, hostname, timestamp) VALUES (0, 'php', '%message in %file on line %line.', 'a:4:{s:6:\"%error\";s:7:\"warning\";s:8:\"%message\";s:138:\"realpath(): open_basedir restriction in effect. File(/tmp) is not within the allowed path(s): (/var/www/html/science/science.uni-obuda.hu)\";s:5:\"%file\";s:60:\"/var/www/html/science/science.uni-obuda.hu/includes/file.inc\";s:5:\"%line\";i:200;}', 3, '', 'http://science.uni-obuda.hu/node/4977', '', '216.73.216.36', 1783584696) in /var/www/html/science/science.uni-obuda.hu/includes/database.mysql.inc on line 135 Warning: Table './science/watchdog' is marked as crashed and should be repaired query: INSERT INTO watchdog (uid, type, message, variables, severity, link, location, referer, hostname, timestamp) VALUES (0, 'php', '%message in %file on line %line.', 'a:4:{s:6:\"%error\";s:7:\"warning\";s:8:\"%message\";s:138:\"realpath(): open_basedir restriction in effect. File(/tmp) is not within the allowed path(s): (/var/www/html/science/science.uni-obuda.hu)\";s:5:\"%file\";s:60:\"/var/www/html/science/science.uni-obuda.hu/includes/file.inc\";s:5:\"%line\";i:200;}', 3, '', 'http://science.uni-obuda.hu/node/4977', '', '216.73.216.36', 1783584696) in /var/www/html/science/science.uni-obuda.hu/includes/database.mysql.inc on line 135 Investigation of non-selective material removal by electrochemical method on different III-V semiconductors | science.uni-obuda.hu
Ugrás a tartalomra

Investigation of non-selective material removal by electrochemical method on different III-V semiconductors

CímInvestigation of non-selective material removal by electrochemical method on different III-V semiconductors
Közlemény típusaJournal Article
Kiadás éve2001
SzerzőkNemcsics, Á., D. L, and D. L
FolyóiratACTA TECHNICA CSAV
Évfolyam108
Kötet46
Oldalszám521 - 531
Kiadás dátuma2001
Kiadás nyelveeng
Összefoglalás

The electrochemical layer removal is widely used in the processing of semiconductors. The surface remaining after the layer removal is generally rough. Under certain conditions this layer removal may be selective and it results in the development of dislocation while under other conditions the selectivity decreases and the surface remains smooth after the electrochemical etching. In our present work we compared the surface characteristics of GaAs and InP after electrochemical layer removal using different electrolytes. The investigation of the surface was carried out using scanning electron microscopy and α-step profiling equipment. In order to compare the surface roughness we introduced a so-called roughness number. The surface morphology was investigated from the point of view of pattern formation.
Warning: Table './science/watchdog' is marked as crashed and should be repaired query: INSERT INTO watchdog (uid, type, message, variables, severity, link, location, referer, hostname, timestamp) VALUES (0, 'php', '%message in %file on line %line.', 'a:4:{s:6:\"%error\";s:12:\"user warning\";s:8:\"%message\";s:263:\"Table './science/sessions' is marked as crashed and should be repaired\nquery: UPDATE sessions SET uid = 0, cache = 0, hostname = '216.73.216.36', session = '', timestamp = 1783584696 WHERE sid = 'l2hh0s2ak3gae3i9qi975sptv0'\";s:5:\"%file\";s:63:\"/var/www/html/science/science.uni-obuda.hu/includes/session.inc\";s:5:\"%line\";i:69;}', 3, '', 'http://science.uni-obuda.hu/node/4977', '', '216.73.216.36', 1783584696) in /var/www/html/science/science.uni-obuda.hu/includes/database.mysql.inc on line 135