Studies on the RF sputtered amorphous SiGe thin films
| Title | Studies on the RF sputtered amorphous SiGe thin films |
| Publication Type | Journal Article |
| Year of Publication | 2006 |
| Authors | M, S., L. T, Z. Z, P. P, Á. Nemcsics, K. NQ, and P. Turmezei |
| Journal | INORGANIC MATERIALS |
| Volume | 42 |
| Issue | 1 |
| Pagination | 3 - 6 |
| Date Published | 2006 |
| Publication Language | eng |
| Abstract | In this study, rf sputtered hydrogenated amorphous silicon-germaniumthin films deposited at room temperature have been investigated by |