Publications
Found 4 results
Filters: Author is Serenyi M [Clear All Filters]
"Investigation of thermal stability of hydrogenated amorphous Si/Gemultilayers",
VACUUM, vol. 84, issue 1, BEKE DL, 1998, VACUUM, V50, P373BEYER W, 1996, J NONCRYSTAL SOLIDS, V208, P277
COHEN JD, 2003, SOL ENERG MAT SOL C, V78, P399, DOI
10.1016/S0927-0248(02)00445-2
CSIK A, 2001, J APPL PHYS, V89, P804
CSIK A, 2001, VACUUM, V61, P297
DAROCZI L, 1996, J MAGN M, pp. 137 - 140, 2009.
Abstract
"Composition and Thickness of RE Sputtered Amorphous Silicon Alloy Films",
ACTA POLYTECHNICA HUNGARICA, vol. 5, issue 2, pp. 23 - 30, 2008.
"Studies on the RF sputtered amorphous SiGe thin films",
INORGANIC MATERIALS, vol. 42, issue 1, pp. 3 - 6, 2006.
Abstract
"Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films",
MICROELECTRONICS RELIABILITY, vol. 45, issue 7-8, pp. 1252 - 1256, 2005.