Publications
Found 3 results
Filters: Author is Khanh NQ [Clear All Filters]
"Composition and Thickness of RE Sputtered Amorphous Silicon Alloy Films",
ACTA POLYTECHNICA HUNGARICA, vol. 5, issue 2, pp. 23 - 30, 2008.
"Studies on the RF sputtered amorphous SiGe thin films",
INORGANIC MATERIALS, vol. 42, issue 1, pp. 3 - 6, 2006.
Abstract
"Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films",
MICROELECTRONICS RELIABILITY, vol. 45, issue 7-8, pp. 1252 - 1256, 2005.