Composition and Thickness of RE Sputtered Amorphous Silicon Alloy Films
| Title | Composition and Thickness of RE Sputtered Amorphous Silicon Alloy Films |
| Publication Type | Journal Article |
| Year of Publication | 2008 |
| Authors | T, L., S. M, B. DK, K. NQ, Á. Nemcsics, P. P, and P. Turmezei |
| Journal | ACTA POLYTECHNICA HUNGARICA |
| Volume | 5 |
| Issue | 2 |
| Pagination | 23 - 30 |
| Date Published | 2008 |
| Publication Language | eng |
| URL | http://www.mtakpa.hu/kpa/download/1212225.pdf |