Studies on the sputtered hydrogenated amorphous SiGe thin films
| Title | Studies on the sputtered hydrogenated amorphous SiGe thin films |
| Publication Type | Conference Paper |
| Year of Publication | 2004 |
| Publication Language | eng |
| Pagination | 80 - 81 |
| Authors | Serényi, M., T. Lohner, N. Q. Khanh, Á. Nemcsics, and P. Turmezei |
| Conference Name | Proceedings of 10th Joint Vacuum Conference |
| Date Published | 2004 |