Silicon nitride based non-volatile memory structures with embedded Si or Ge nanocrystals
Title | Silicon nitride based non-volatile memory structures with embedded Si or Ge nanocrystals |
Publication Type | Journal Article |
Year of Publication | 2010 |
Authors | Horváth, Z. J., P. Basa, T. Jászi, A. E. Pap, G. Molnár, A. I. Kovalev, D. L. Wainstein, T. Gerlai, and P. Turmezei |
Journal | Communications, Scientific Letters of the University of Zilina |
Volume | 12 |
Issue | 2 |
Pagination | 19-22 |
Publication Language | English |
ISSN Number | 1335-4205 |