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Silicon nitride based non-volatile memory structures with embedded Si or Ge nanocrystals

TitleSilicon nitride based non-volatile memory structures with embedded Si or Ge nanocrystals
Publication TypeJournal Article
Year of Publication2010
AuthorsHorváth, Z. J., P. Basa, T. Jászi, A. E. Pap, G. Molnár, A. I. Kovalev, D. L. Wainstein, T. Gerlai, and P. Turmezei
JournalCommunications, Scientific Letters of the University of Zilina
Volume12
Issue2
Pagination19-22
Publication LanguageEnglish
ISSN Number1335-4205

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