Electrical study of annealed silicon nitride thin layers containing excess silicon
| Title | Electrical study of annealed silicon nitride thin layers containing excess silicon |
| Publication Type | Conference Proceedings |
| Year of Publication | 2006 |
| Authors | Basa, P., P. Szöllősi, and Z. J. Horváth |
| Conference Name | Kando Conference 2006 |
| Series Title | Kando Conference |
| Conference Location | Budapest |
| Publication Language | Hungarian |