Development of Si nanocrystal layers embedded in Si3N4
Title | Development of Si nanocrystal layers embedded in Si3N4 |
Publication Type | Conference Proceedings |
Year of Publication | 2011 |
Authors | Tóth, L., P. Basa, T. Jászi, L. Dobos, B. Pécz, and Z. J. Horváth |
Conference Name | 10th Multinational Congress on Microscopy 2011 |
Pagination | 559-560 |
Date Published | 09/2011 |
Conference Location | Urbino, Italy |
Publication Language | English |