X-ray photoelectron spectroscopy investigations of Si in non-stoichiometric SiNx LPCVD multilayered coatings
| Title | X-ray photoelectron spectroscopy investigations of Si in non-stoichiometric SiNx LPCVD multilayered coatings |
| Publication Type | Journal Article |
| Year of Publication | 2007 |
| Authors | Wainstein, D. L., A. I. Kovalev, C. Ducso, T. Jaszi, P. Basa, Z. J. Horváth, T. Lohner, and P. Petrik |
| Journal | Physica E |
| Volume | 38 |
| Pagination | 156–159 |
| Publication Language | English |
| ISSN Number | 114 |
| DOI | 10.1016/j.physe.2006.12.039 |