Publications
Found 3 results
Filters: Author is P Petrik [Clear All Filters]
"X-ray photoelectron spectroscopy investigations of Si in non-stoichiometric SiNx LPCVD multilayered coatings",
Physica E, vol. 38, pp. 156–159, 2007.
"Spectroellipsometric characterization of sputtered amorphous silicon germanium thin films",
E-MRS 2005 Spring Meeting, pp. & - , 2006.
"Electrical and optical properties of Si-rich SiNx layers: Effect of annealing",
Current Appl. Phys., vol. 6, issue 2, pp. 179-181, 2006.