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Electrical and ellipsometry study of sputtered SiO2 structures with embedded Ge nanocrystals

TitleElectrical and ellipsometry study of sputtered SiO2 structures with embedded Ge nanocrystals
Publication TypeJournal Article
Year of Publication2008
AuthorsBasa, P., A. S. Alagoz, T. Lohner, M. Kulakci, R. Turan, K. Nagy, and Z. J. Horváth
JournalAppl. Surf. Sci.
Volume254
Pagination3626-3629
Publication LanguageEnglish
ISSN Number0169-4332

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