Electrical and ellipsometry study of sputtered SiO2 structures with embedded Ge nanocrystals
Title | Electrical and ellipsometry study of sputtered SiO2 structures with embedded Ge nanocrystals |
Publication Type | Journal Article |
Year of Publication | 2008 |
Authors | Basa, P., A. S. Alagoz, T. Lohner, M. Kulakci, R. Turan, K. Nagy, and Z. J. Horváth |
Journal | Appl. Surf. Sci. |
Volume | 254 |
Pagination | 3626-3629 |
Publication Language | English |
ISSN Number | 0169-4332 |