Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films
| Title | Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films |
| Publication Type | Journal Article |
| Year of Publication | 2005 |
| Authors | M, S., B. J, Á. Nemesics, K. NQ, B. DK, and M. M |
| Journal | MICROELECTRONICS RELIABILITY |
| Volume | 45 |
| Issue | 7-8 |
| Pagination | 1252 - 1256 |
| Date Published | 2005 |
| Publication Language | eng |