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Morvic M
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2005
M, S.
,
B. J
,
Á. Nemesics
,
K. NQ
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B. DK
, and
M. M
,
"
Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films
",
MICROELECTRONICS RELIABILITY
, vol. 45, issue 7-8, pp. 1252 - 1256, 2005.
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