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Publications

Found 2 results

Filters: Author is Betko J  [Clear All Filters]
2005
M, S., B. J, Á. Nemesics, K. NQ, B. DK, and M. M, "Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films", MICROELECTRONICS RELIABILITY, vol. 45, issue 7-8, pp. 1252 - 1256, 2005.
2000
M, S., Á. Nemcsics, B. J, Z. Z, K. N, and Z. J. Horváth, "Sputtered a- SiGe:H layers for solar cell purposes", SSSI-II Book of extended abstracts, pp. 65 - , 2000.