Spectroellipsometric characterization of sputtered amorphous silicon germanium thin films
| Title | Spectroellipsometric characterization of sputtered amorphous silicon germanium thin films |
| Publication Type | Conference Paper |
| Year of Publication | 2006 |
| Publication Language | eng |
| Pagination | & - |
| Authors | Lohner, T., M. Serényi, Z. Zolnai, P. Petrik, Á. Nemcsics, and N. Q. Khanh |
| Conference Name | E-MRS 2005 Spring Meeting |
| Date Published | 2006 |