Electrical and optical properties of Si-rich SiNx layers: Effect of annealing
| Title | Electrical and optical properties of Si-rich SiNx layers: Effect of annealing |
| Publication Type | Journal Article |
| Year of Publication | 2006 |
| Authors | Szöllősi, P., P. Basa, C. Dücső, B. Máté, M. Ádám, T. Lohner, P. Petrik, B. Pécz, L. Tóth, L. Dobos, L. Dózsa, and Z. J. Horváth |
| Journal | Current Appl. Phys. |
| Volume | 6 |
| Issue | 2 |
| Pagination | 179-181 |
| Publication Language | English |
| ISSN Number | 111 |