Publications

A, C., S. M, E. Z, Á. Nemcsics, C. C, L. GA, B. DL, F. C, and S. A, "Investigation of thermal stability of hydrogenated amorphous Si/Gemultilayers", VACUUM, vol. 84, issue 1, BEKE DL, 1998, VACUUM, V50, P373BEYER W, 1996, J NONCRYSTAL SOLIDS, V208, P277 COHEN JD, 2003, SOL ENERG MAT SOL C, V78, P399, DOI 10.1016/S0927-0248(02)00445-2 CSIK A, 2001, J APPL PHYS, V89, P804 CSIK A, 2001, VACUUM, V61, P297 DAROCZI L, 1996, J MAGN M, pp. 137 - 140, 2009. Abstract

T, L., S. M, B. DK, K. NQ, Á. Nemcsics, P. P, and P. Turmezei, "Composition and Thickness of RE Sputtered Amorphous Silicon Alloy Films", ACTA POLYTECHNICA HUNGARICA, vol. 5, issue 2, pp. 23 - 30, 2008.

M, S., L. T, Z. Z, P. P, Á. Nemcsics, K. NQ, and P. Turmezei, "Studies on the RF sputtered amorphous SiGe thin films", INORGANIC MATERIALS, vol. 42, issue 1, pp. 3 - 6, 2006. Abstract

M, S., B. J, Á. Nemesics, K. NQ, B. DK, and M. M, "Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films", MICROELECTRONICS RELIABILITY, vol. 45, issue 7-8, pp. 1252 - 1256, 2005.