Publications
Found 6 results
Szűrők: Szerző = T Lohner [Minden szűrő visszaállítása]
"Electrical and ellipsometry study of sputtered SiO2 structures with embedded Ge nanocrystals",
Appl. Surf. Sci., vol. 254, pp. 3626-3629, 2008.
"X-ray photoelectron spectroscopy investigations of Si in non-stoichiometric SiNx LPCVD multilayered coatings",
Physica E, vol. 38, pp. 156–159, 2007.
"Spectroellipsometric characterization of sputtered amorphous silicon germanium thin films",
E-MRS 2005 Spring Meeting, pp. & - , 2006.
"Electrical and ellipsometry study of sputtered SiO2 structures containing Ge nanocrystals",
5th Solid State Surfaces and Interfaces, Extended Abstract Book, Smolenice, Slovakia, pp. 17-20, 2006.
"Electrical and optical properties of Si-rich SiNx layers: Effect of annealing",
Current Appl. Phys., vol. 6, issue 2, pp. 179-181, 2006.
"Studies on the sputtered hydrogenated amorphous SiGe thin films",
Proceedings of 10th Joint Vacuum Conference, pp. 80 - 81, 2004.